Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties /

Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties / / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.

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Superior document:Nanotechnology science and technology
:
ProQuest (Firm)
Ree, Moonhor.
TeilnehmendeR:
Yoon, Jinhwan.
Heo, Kyuyoung.
ProQuest (Firm)
Year of Publication:2010
Language:English
Series:Nanotechnology science and technology series.
Online Access:
Physical Description:67 p. :; ill.
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record_format marc
spelling Ree, Moonhor.
Low-k nanoporous interdielectrics [electronic resource] : materials, thin film fabrications, structures and properties / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.
Hauppauge, N.Y. : Nova Science Publishers, c2010.
67 p. : ill.
Nanotechnology science and technology
Includes bibliographical references (p. [51]-61) and index.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Dielectric films.
Microelectronics Materials.
Porous materials.
Interconnects (Integrated circuit technology)
Electronic books.
Yoon, Jinhwan.
Heo, Kyuyoung.
ProQuest (Firm)
Nanotechnology science and technology series.
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3019998 Click to View
language English
format Electronic
eBook
author Ree, Moonhor.
spellingShingle Ree, Moonhor.
Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties /
Nanotechnology science and technology
author_facet Ree, Moonhor.
Yoon, Jinhwan.
Heo, Kyuyoung.
ProQuest (Firm)
ProQuest (Firm)
author_variant m r mr
author2 Yoon, Jinhwan.
Heo, Kyuyoung.
ProQuest (Firm)
author2_variant j y jy
k h kh
author2_role TeilnehmendeR
TeilnehmendeR
TeilnehmendeR
author_corporate ProQuest (Firm)
author_sort Ree, Moonhor.
title Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties /
title_sub materials, thin film fabrications, structures and properties /
title_full Low-k nanoporous interdielectrics [electronic resource] : materials, thin film fabrications, structures and properties / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.
title_fullStr Low-k nanoporous interdielectrics [electronic resource] : materials, thin film fabrications, structures and properties / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.
title_full_unstemmed Low-k nanoporous interdielectrics [electronic resource] : materials, thin film fabrications, structures and properties / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.
title_auth Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties /
title_new Low-k nanoporous interdielectrics
title_sort low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties /
series Nanotechnology science and technology
series2 Nanotechnology science and technology
publisher Nova Science Publishers,
publishDate 2010
physical 67 p. : ill.
isbn 9781617283185 (electronic bk.)
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7871
callnumber-sort TK 47871.15 F5 R44 42010
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=3019998
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.381
dewey-sort 3621.381
dewey-raw 621.381
dewey-search 621.381
oclc_num 923662443
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