Wafer Fabrication : : Automatic Material Handling System /

Wafer Fabrication : : Automatic Material Handling System / / Jie Zhang.

This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research c...

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Bibliographic Details
Superior document:Title is part of eBook package: De Gruyter DG Plus eBook-Package 2018
VerfasserIn:
Zhang, Jie,
TeilnehmendeR:
Huazhong University of Science and Technology,.
Place / Publishing House:Berlin ;, Boston : : De Gruyter, , [2018]
©2018
Year of Publication:2018
Language:English
Online Access:
Physical Description:1 online resource (XII, 272 p.)
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Table of Contents:
  • Frontmatter
  • Preface
  • Contents
  • 1 Semiconductor wafer fabrication system
  • 2 Automated material handling systems in SWFSs
  • 3 Modeling methods of automated material handling systems in SWFSs
  • 4 Analysis of automated material handling systems in SWFSs
  • 5 Scheduling methods of automated material handling systems in SWFSs
  • 6 Scheduling in Interbay automated material handling systems
  • 7 Scheduling in Intrabay automatic material handling systems
  • 8 Integrated scheduling in AMHSs
  • 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs
  • Index

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