Wafer Fabrication : : Automatic Material Handling System / / Jie Zhang.
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research c...
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| Superior document: | Title is part of eBook package: De Gruyter DG Plus eBook-Package 2018 |
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| VerfasserIn: | |
| TeilnehmendeR: | |
| Place / Publishing House: | Berlin ;, Boston : : De Gruyter, , [2018] ©2018 |
| Year of Publication: | 2018 |
| Language: | English |
| Online Access: | |
| Physical Description: | 1 online resource (XII, 272 p.) |
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