Wafer Fabrication : : Automatic Material Handling System / / Jie Zhang.
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research c...
Saved in:
| Superior document: | Title is part of eBook package: De Gruyter DG Plus eBook-Package 2018 |
|---|---|
| VerfasserIn: | |
| TeilnehmendeR: | |
| Place / Publishing House: | Berlin ;, Boston : : De Gruyter, , [2018] ©2018 |
| Year of Publication: | 2018 |
| Language: | English |
| Online Access: | |
| Physical Description: | 1 online resource (XII, 272 p.) |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| id |
9783110487473 |
|---|---|
| lccn |
2018007853 |
| ctrlnum |
(DE-B1597)468725 (OCoLC)1059296326 |
| collection |
bib_alma |
| record_format |
marc |
| spelling |
Zhang, Jie, author. aut http://id.loc.gov/vocabulary/relators/aut Wafer Fabrication : Automatic Material Handling System / Jie Zhang. Berlin ; Boston : De Gruyter, [2018] ©2018 1 online resource (XII, 272 p.) text txt rdacontent computer c rdamedia online resource cr rdacarrier text file PDF rda Frontmatter -- Preface -- Contents -- 1 Semiconductor wafer fabrication system -- 2 Automated material handling systems in SWFSs -- 3 Modeling methods of automated material handling systems in SWFSs -- 4 Analysis of automated material handling systems in SWFSs -- 5 Scheduling methods of automated material handling systems in SWFSs -- 6 Scheduling in Interbay automated material handling systems -- 7 Scheduling in Intrabay automatic material handling systems -- 8 Integrated scheduling in AMHSs -- 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- Index restricted access http://purl.org/coar/access_right/c_16ec online access with authorization star This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management. Mode of access: Internet via World Wide Web. In English. Description based on online resource; title from PDF title page (publisher's Web site, viewed 30. Aug 2021) Manufacturing processes Automatic control. Semiconductor wafers Automatic control. Technology & Engineering / Manufacturing. bisacsh Huazhong University of Science and Technology,. Title is part of eBook package: De Gruyter DG Plus eBook-Package 2018 9783110719550 Title is part of eBook package: De Gruyter EBOOK PACKAGE COMPLETE 2018 English 9783110604252 Title is part of eBook package: De Gruyter EBOOK PACKAGE COMPLETE 2018 9783110603255 ZDB-23-DGG Title is part of eBook package: De Gruyter EBOOK PACKAGE Engineering, Computer Sciences 2018 English 9783110604023 Title is part of eBook package: De Gruyter EBOOK PACKAGE Engineering, Computer Sciences 2018 9783110603118 ZDB-23-DEI EPUB 9783110487237 print 9783110486902 https://doi.org/10.1515/9783110487473 https://www.degruyter.com/isbn/9783110487473 Cover https://www.degruyter.com/cover/covers/9783110487473.jpg |
| language |
English |
| format |
eBook |
| author |
Zhang, Jie, Zhang, Jie, |
| spellingShingle |
Zhang, Jie, Zhang, Jie, Wafer Fabrication : Automatic Material Handling System / Frontmatter -- Preface -- Contents -- 1 Semiconductor wafer fabrication system -- 2 Automated material handling systems in SWFSs -- 3 Modeling methods of automated material handling systems in SWFSs -- 4 Analysis of automated material handling systems in SWFSs -- 5 Scheduling methods of automated material handling systems in SWFSs -- 6 Scheduling in Interbay automated material handling systems -- 7 Scheduling in Intrabay automatic material handling systems -- 8 Integrated scheduling in AMHSs -- 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- Index |
| author_facet |
Zhang, Jie, Zhang, Jie, Huazhong University of Science and Technology,. |
| author_variant |
j z jz j z jz |
| author_role |
VerfasserIn VerfasserIn |
| author2 |
Huazhong University of Science and Technology,. |
| author2_variant |
u o s a t h uosat uosath |
| author2_role |
TeilnehmendeR |
| author_sort |
Zhang, Jie, |
| title |
Wafer Fabrication : Automatic Material Handling System / |
| title_sub |
Automatic Material Handling System / |
| title_full |
Wafer Fabrication : Automatic Material Handling System / Jie Zhang. |
| title_fullStr |
Wafer Fabrication : Automatic Material Handling System / Jie Zhang. |
| title_full_unstemmed |
Wafer Fabrication : Automatic Material Handling System / Jie Zhang. |
| title_auth |
Wafer Fabrication : Automatic Material Handling System / |
| title_alt |
Frontmatter -- Preface -- Contents -- 1 Semiconductor wafer fabrication system -- 2 Automated material handling systems in SWFSs -- 3 Modeling methods of automated material handling systems in SWFSs -- 4 Analysis of automated material handling systems in SWFSs -- 5 Scheduling methods of automated material handling systems in SWFSs -- 6 Scheduling in Interbay automated material handling systems -- 7 Scheduling in Intrabay automatic material handling systems -- 8 Integrated scheduling in AMHSs -- 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- Index |
| title_new |
Wafer Fabrication : |
| title_sort |
wafer fabrication : automatic material handling system / |
| publisher |
De Gruyter, |
| publishDate |
2018 |
| physical |
1 online resource (XII, 272 p.) |
| contents |
Frontmatter -- Preface -- Contents -- 1 Semiconductor wafer fabrication system -- 2 Automated material handling systems in SWFSs -- 3 Modeling methods of automated material handling systems in SWFSs -- 4 Analysis of automated material handling systems in SWFSs -- 5 Scheduling methods of automated material handling systems in SWFSs -- 6 Scheduling in Interbay automated material handling systems -- 7 Scheduling in Intrabay automatic material handling systems -- 8 Integrated scheduling in AMHSs -- 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- Index |
| isbn |
9783110487473 9783110719550 9783110604252 9783110603255 9783110604023 9783110603118 9783110487237 9783110486902 |
| callnumber-first |
T - Technology |
| callnumber-subject |
TK - Electrical and Nuclear Engineering |
| callnumber-label |
TK7871 |
| callnumber-sort |
TK 47871.85 Z43 42018 |
| url |
https://doi.org/10.1515/9783110487473 https://www.degruyter.com/isbn/9783110487473 https://www.degruyter.com/cover/covers/9783110487473.jpg |
| illustrated |
Not Illustrated |
| dewey-hundreds |
600 - Technology |
| dewey-tens |
620 - Engineering |
| dewey-ones |
621 - Applied physics |
| dewey-full |
621.39/5 |
| dewey-sort |
3621.39 15 |
| dewey-raw |
621.39/5 |
| dewey-search |
621.39/5 |
| doi_str_mv |
10.1515/9783110487473 |
| oclc_num |
1059296326 |
| work_keys_str_mv |
AT zhangjie waferfabricationautomaticmaterialhandlingsystem AT huazhonguniversityofscienceandtechnology waferfabricationautomaticmaterialhandlingsystem |
| status_str |
n |
| ids_txt_mv |
(DE-B1597)468725 (OCoLC)1059296326 |
| carrierType_str_mv |
cr |
| hierarchy_parent_title |
Title is part of eBook package: De Gruyter DG Plus eBook-Package 2018 Title is part of eBook package: De Gruyter EBOOK PACKAGE COMPLETE 2018 English Title is part of eBook package: De Gruyter EBOOK PACKAGE COMPLETE 2018 Title is part of eBook package: De Gruyter EBOOK PACKAGE Engineering, Computer Sciences 2018 English Title is part of eBook package: De Gruyter EBOOK PACKAGE Engineering, Computer Sciences 2018 |
| is_hierarchy_title |
Wafer Fabrication : Automatic Material Handling System / |
| container_title |
Title is part of eBook package: De Gruyter DG Plus eBook-Package 2018 |
| author2_original_writing_str_mv |
noLinkedField |
| _version_ |
1770177652891582464 |
| fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>04324nam a22008175i 4500</leader><controlfield tag="001">9783110487473</controlfield><controlfield tag="003">DE-B1597</controlfield><controlfield tag="005">20210830012106.0</controlfield><controlfield tag="006">m|||||o||d||||||||</controlfield><controlfield tag="007">cr || ||||||||</controlfield><controlfield tag="008">210830t20182018gw fo d z eng d</controlfield><datafield tag="010" ind1=" " ind2=" "><subfield code="a">2018007853</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783110487473</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1515/9783110487473</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-B1597)468725</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1059296326</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-B1597</subfield><subfield code="b">eng</subfield><subfield code="c">DE-B1597</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="044" ind1=" " ind2=" "><subfield code="a">gw</subfield><subfield code="c">DE</subfield></datafield><datafield tag="050" ind1="0" ind2="0"><subfield code="a">TK7871.85</subfield><subfield code="b">.Z43 2018</subfield></datafield><datafield tag="050" ind1=" " ind2="4"><subfield code="a">TK7871.85</subfield><subfield code="b">.Z43 2018</subfield></datafield><datafield tag="072" ind1=" " ind2="7"><subfield code="a">TEC020000</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">621.39/5</subfield><subfield code="2">23</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Zhang, Jie, </subfield><subfield code="e">author.</subfield><subfield code="4">aut</subfield><subfield code="4">http://id.loc.gov/vocabulary/relators/aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Wafer Fabrication :</subfield><subfield code="b">Automatic Material Handling System /</subfield><subfield code="c">Jie Zhang.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin ;</subfield><subfield code="a">Boston : </subfield><subfield code="b">De Gruyter, </subfield><subfield code="c">[2018]</subfield></datafield><datafield tag="264" ind1=" " ind2="4"><subfield code="c">©2018</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (XII, 272 p.)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">computer</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">online resource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="347" ind1=" " ind2=" "><subfield code="a">text file</subfield><subfield code="b">PDF</subfield><subfield code="2">rda</subfield></datafield><datafield tag="505" ind1="0" ind2="0"><subfield code="t">Frontmatter -- </subfield><subfield code="t">Preface -- </subfield><subfield code="t">Contents -- </subfield><subfield code="t">1 Semiconductor wafer fabrication system -- </subfield><subfield code="t">2 Automated material handling systems in SWFSs -- </subfield><subfield code="t">3 Modeling methods of automated material handling systems in SWFSs -- </subfield><subfield code="t">4 Analysis of automated material handling systems in SWFSs -- </subfield><subfield code="t">5 Scheduling methods of automated material handling systems in SWFSs -- </subfield><subfield code="t">6 Scheduling in Interbay automated material handling systems -- </subfield><subfield code="t">7 Scheduling in Intrabay automatic material handling systems -- </subfield><subfield code="t">8 Integrated scheduling in AMHSs -- </subfield><subfield code="t">9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs -- </subfield><subfield code="t">Index</subfield></datafield><datafield tag="506" ind1="0" ind2=" "><subfield code="a">restricted access</subfield><subfield code="u">http://purl.org/coar/access_right/c_16ec</subfield><subfield code="f">online access with authorization</subfield><subfield code="2">star</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.</subfield></datafield><datafield tag="538" ind1=" " ind2=" "><subfield code="a">Mode of access: Internet via World Wide Web.</subfield></datafield><datafield tag="546" ind1=" " ind2=" "><subfield code="a">In English.</subfield></datafield><datafield tag="588" ind1="0" ind2=" "><subfield code="a">Description based on online resource; title from PDF title page (publisher's Web site, viewed 30. Aug 2021)</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Manufacturing processes</subfield><subfield code="x">Automatic control.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Semiconductor wafers</subfield><subfield code="x">Automatic control.</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Technology & Engineering / Manufacturing.</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Huazhong University of Science and Technology,.</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Title is part of eBook package:</subfield><subfield code="d">De Gruyter</subfield><subfield code="t">DG Plus eBook-Package 2018</subfield><subfield code="z">9783110719550</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Title is part of eBook package:</subfield><subfield code="d">De Gruyter</subfield><subfield code="t">EBOOK PACKAGE COMPLETE 2018 English</subfield><subfield code="z">9783110604252</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Title is part of eBook package:</subfield><subfield code="d">De Gruyter</subfield><subfield code="t">EBOOK PACKAGE COMPLETE 2018</subfield><subfield code="z">9783110603255</subfield><subfield code="o">ZDB-23-DGG</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Title is part of eBook package:</subfield><subfield code="d">De Gruyter</subfield><subfield code="t">EBOOK PACKAGE Engineering, Computer Sciences 2018 English</subfield><subfield code="z">9783110604023</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="i">Title is part of eBook package:</subfield><subfield code="d">De Gruyter</subfield><subfield code="t">EBOOK PACKAGE Engineering, Computer Sciences 2018</subfield><subfield code="z">9783110603118</subfield><subfield code="o">ZDB-23-DEI</subfield></datafield><datafield tag="776" ind1="0" ind2=" "><subfield code="c">EPUB</subfield><subfield code="z">9783110487237</subfield></datafield><datafield tag="776" ind1="0" ind2=" "><subfield code="c">print</subfield><subfield code="z">9783110486902</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1515/9783110487473</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://www.degruyter.com/isbn/9783110487473</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="3">Cover</subfield><subfield code="u">https://www.degruyter.com/cover/covers/9783110487473.jpg</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">978-3-11-060402-3 EBOOK PACKAGE Engineering, Computer Sciences 2018 English</subfield><subfield code="b">2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">978-3-11-060425-2 EBOOK PACKAGE COMPLETE 2018 English</subfield><subfield code="b">2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">978-3-11-071955-0 DG Plus eBook-Package 2018</subfield><subfield code="b">2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">EBA_BACKALL</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">EBA_CL_CHCOMSGSEN</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">EBA_DGALL</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">EBA_EBACKALL</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">EBA_EBKALL</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">EBA_ECL_CHCOMSGSEN</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">EBA_EEBKALL</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">EBA_ESTMALL</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">EBA_STMALL</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">GBV-deGruyter-alles</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">PDA12STME</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">PDA13ENGE</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">PDA18STMEE</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">PDA5EBK</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-23-DEI</subfield><subfield code="b">2018</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-23-DGG</subfield><subfield code="b">2017</subfield></datafield></record></collection> |