Silicon science and advanced micro-device engineering I : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / / edited by Osamu Hanaizumi and Masafumi Unno.
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| Year of Publication: | 2011 |
| Language: | English |
| Series: | Key engineering materials,
v. 459 |
| Online Access: | |
| Physical Description: | xii, 282 p. :; ill. |
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| Other title: | 5th International Symposium on Silicon Science Fifth International Symposium on Silicon Science International Symposium on Silicon Science 1st International Conference on Advanced Micro-Device Engineering First International Conference on Advanced Micro-Device Engineering International Conference on Advanced Micro-Device Engineering ISSS & AMDE 2009 AMDE 2009 |
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| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 9780878492176 (pbk.) 0878492178 (pbk.) 9780878492176 9783038134817 (electronic bk.) |
| ISSN: | 1013-9826 ; |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | edited by Osamu Hanaizumi and Masafumi Unno. |