Silicon science and advanced micro-device engineering I : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /

Silicon science and advanced micro-device engineering I : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / / edited by Osamu Hanaizumi and Masafumi Unno.

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International Symposium on Silicon Science Kiryu-shi, Japan)
TeilnehmendeR:
Hanaizumi, Osamu.
Unno, Masafumi.
Gunma Daigaku. International Education and Research Center for Silicon Science.
Gunma Daigaku. Advanced Technology Research Center.
ProQuest (Firm)
International Conference on Advanced Micro-Device Engineering (1st : 2009 : Kiryu-shi, Japan)
Year of Publication:2011
Language:English
Series:Key engineering materials, v. 459
Online Access:
Physical Description:xii, 282 p. :; ill.
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id 5001872512
ctrlnum (MiAaPQ)5001872512
(Au-PeEL)EBL1872512
(CaPaEBR)ebr10604228
(OCoLC)897640678
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spelling International Symposium on Silicon Science (5th : 2009 : Kiryu-shi, Japan)
Silicon science and advanced micro-device engineering I [electronic resource] : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / edited by Osamu Hanaizumi and Masafumi Unno.
5th International Symposium on Silicon Science
Fifth International Symposium on Silicon Science
International Symposium on Silicon Science
1st International Conference on Advanced Micro-Device Engineering
First International Conference on Advanced Micro-Device Engineering
International Conference on Advanced Micro-Device Engineering
ISSS & AMDE 2009
ISSS 2009
AMDE 2009
Stafa-Zurich ; Enfield, N.H. : Trans Tech Publications, 2011.
xii, 282 p. : ill.
Key engineering materials, 1013-9826 ; v. 459
Includes bibliographical references and indexes.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Silicon Congresses.
Nanostructures Congresses.
Microelectronics Congresses.
Electronic books.
Hanaizumi, Osamu.
Unno, Masafumi.
Gunma Daigaku. International Education and Research Center for Silicon Science.
Gunma Daigaku. Advanced Technology Research Center.
ProQuest (Firm)
International Conference on Advanced Micro-Device Engineering (1st : 2009 : Kiryu-shi, Japan)
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1872512 Click to View
language English
format Electronic
Conference Proceeding
eBook
author2 Hanaizumi, Osamu.
Unno, Masafumi.
Gunma Daigaku. International Education and Research Center for Silicon Science.
Gunma Daigaku. Advanced Technology Research Center.
ProQuest (Firm)
International Conference on Advanced Micro-Device Engineering (1st : 2009 : Kiryu-shi, Japan)
author_facet Hanaizumi, Osamu.
Unno, Masafumi.
Gunma Daigaku. International Education and Research Center for Silicon Science.
Gunma Daigaku. Advanced Technology Research Center.
ProQuest (Firm)
International Conference on Advanced Micro-Device Engineering (1st : 2009 : Kiryu-shi, Japan)
International Symposium on Silicon Science Kiryu-shi, Japan)
Gunma Daigaku. International Education and Research Center for Silicon Science.
Gunma Daigaku. Advanced Technology Research Center.
ProQuest (Firm)
International Conference on Advanced Micro-Device Engineering
author2_variant o h oh
m u mu
author2_role TeilnehmendeR
TeilnehmendeR
TeilnehmendeR
TeilnehmendeR
TeilnehmendeR
TeilnehmendeR
author_corporate International Symposium on Silicon Science Kiryu-shi, Japan)
Gunma Daigaku. International Education and Research Center for Silicon Science.
Gunma Daigaku. Advanced Technology Research Center.
ProQuest (Firm)
International Conference on Advanced Micro-Device Engineering
author_sort International Symposium on Silicon Science Kiryu-shi, Japan)
title Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /
spellingShingle Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /
title_sub selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /
title_full Silicon science and advanced micro-device engineering I [electronic resource] : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / edited by Osamu Hanaizumi and Masafumi Unno.
title_fullStr Silicon science and advanced micro-device engineering I [electronic resource] : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / edited by Osamu Hanaizumi and Masafumi Unno.
title_full_unstemmed Silicon science and advanced micro-device engineering I [electronic resource] : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / edited by Osamu Hanaizumi and Masafumi Unno.
title_auth Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /
title_alt 5th International Symposium on Silicon Science
Fifth International Symposium on Silicon Science
International Symposium on Silicon Science
1st International Conference on Advanced Micro-Device Engineering
First International Conference on Advanced Micro-Device Engineering
International Conference on Advanced Micro-Device Engineering
ISSS & AMDE 2009
AMDE 2009
title_new Silicon science and advanced micro-device engineering I
title_sort silicon science and advanced micro-device engineering i selected, peer reviewed papers from the 5th international symposium on silicon science and the 1st international conference on advanced micro-device engineering (isss & amde 2009), was held by the international education and research center for silicon science and the advanced technology research center (atec), gunma university on 10 and 11 december 2009 in kiryu, japan /
publisher Trans Tech Publications,
publishDate 2011
physical xii, 282 p. : ill.
isbn 9783038134817 (electronic bk.)
issn 1013-9826 ;
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7871
callnumber-sort TK 47871.15 S55 I585 42009
genre Electronic books.
genre_facet Congresses.
Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1872512
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.381
dewey-sort 3621.381
dewey-raw 621.381
dewey-search 621.381
oclc_num 897640678
work_keys_str_mv AT internationalsymposiumonsiliconsciencekiryushijapan siliconscienceandadvancedmicrodeviceengineeringiselectedpeerreviewedpapersfromthe5thinternationalsymposiumonsiliconscienceandthe1stinternationalconferenceonadvancedmicrodeviceengineeringisssamde2009washeldbytheinternationaleducationandresearchcenterforsil
AT hanaizumiosamu siliconscienceandadvancedmicrodeviceengineeringiselectedpeerreviewedpapersfromthe5thinternationalsymposiumonsiliconscienceandthe1stinternationalconferenceonadvancedmicrodeviceengineeringisssamde2009washeldbytheinternationaleducationandresearchcenterforsil
AT unnomasafumi siliconscienceandadvancedmicrodeviceengineeringiselectedpeerreviewedpapersfromthe5thinternationalsymposiumonsiliconscienceandthe1stinternationalconferenceonadvancedmicrodeviceengineeringisssamde2009washeldbytheinternationaleducationandresearchcenterforsil
AT gunmadaigakuinternationaleducationandresearchcenterforsiliconscience siliconscienceandadvancedmicrodeviceengineeringiselectedpeerreviewedpapersfromthe5thinternationalsymposiumonsiliconscienceandthe1stinternationalconferenceonadvancedmicrodeviceengineeringisssamde2009washeldbytheinternationaleducationandresearchcenterforsil
AT gunmadaigakuadvancedtechnologyresearchcenter siliconscienceandadvancedmicrodeviceengineeringiselectedpeerreviewedpapersfromthe5thinternationalsymposiumonsiliconscienceandthe1stinternationalconferenceonadvancedmicrodeviceengineeringisssamde2009washeldbytheinternationaleducationandresearchcenterforsil
AT proquestfirm siliconscienceandadvancedmicrodeviceengineeringiselectedpeerreviewedpapersfromthe5thinternationalsymposiumonsiliconscienceandthe1stinternationalconferenceonadvancedmicrodeviceengineeringisssamde2009washeldbytheinternationaleducationandresearchcenterforsil
AT internationalconferenceonadvancedmicrodeviceengineeringkiryushijapan siliconscienceandadvancedmicrodeviceengineeringiselectedpeerreviewedpapersfromthe5thinternationalsymposiumonsiliconscienceandthe1stinternationalconferenceonadvancedmicrodeviceengineeringisssamde2009washeldbytheinternationaleducationandresearchcenterforsil
AT internationalsymposiumonsiliconsciencekiryushijapan 5thinternationalsymposiumonsiliconscience
AT hanaizumiosamu 5thinternationalsymposiumonsiliconscience
AT unnomasafumi 5thinternationalsymposiumonsiliconscience
AT gunmadaigakuinternationaleducationandresearchcenterforsiliconscience 5thinternationalsymposiumonsiliconscience
AT gunmadaigakuadvancedtechnologyresearchcenter 5thinternationalsymposiumonsiliconscience
AT proquestfirm 5thinternationalsymposiumonsiliconscience
AT internationalconferenceonadvancedmicrodeviceengineeringkiryushijapan 5thinternationalsymposiumonsiliconscience
AT internationalsymposiumonsiliconsciencekiryushijapan fifthinternationalsymposiumonsiliconscience
AT hanaizumiosamu fifthinternationalsymposiumonsiliconscience
AT unnomasafumi fifthinternationalsymposiumonsiliconscience
AT gunmadaigakuinternationaleducationandresearchcenterforsiliconscience fifthinternationalsymposiumonsiliconscience
AT gunmadaigakuadvancedtechnologyresearchcenter fifthinternationalsymposiumonsiliconscience
AT proquestfirm fifthinternationalsymposiumonsiliconscience
AT internationalconferenceonadvancedmicrodeviceengineeringkiryushijapan fifthinternationalsymposiumonsiliconscience
AT internationalsymposiumonsiliconsciencekiryushijapan internationalsymposiumonsiliconscience
AT hanaizumiosamu internationalsymposiumonsiliconscience
AT unnomasafumi internationalsymposiumonsiliconscience
AT gunmadaigakuinternationaleducationandresearchcenterforsiliconscience internationalsymposiumonsiliconscience
AT gunmadaigakuadvancedtechnologyresearchcenter internationalsymposiumonsiliconscience
AT proquestfirm internationalsymposiumonsiliconscience
AT internationalconferenceonadvancedmicrodeviceengineeringkiryushijapan internationalsymposiumonsiliconscience
AT internationalsymposiumonsiliconsciencekiryushijapan 1stinternationalconferenceonadvancedmicrodeviceengineering
AT hanaizumiosamu 1stinternationalconferenceonadvancedmicrodeviceengineering
AT unnomasafumi 1stinternationalconferenceonadvancedmicrodeviceengineering
AT gunmadaigakuinternationaleducationandresearchcenterforsiliconscience 1stinternationalconferenceonadvancedmicrodeviceengineering
AT gunmadaigakuadvancedtechnologyresearchcenter 1stinternationalconferenceonadvancedmicrodeviceengineering
AT proquestfirm 1stinternationalconferenceonadvancedmicrodeviceengineering
AT internationalconferenceonadvancedmicrodeviceengineeringkiryushijapan 1stinternationalconferenceonadvancedmicrodeviceengineering
AT internationalsymposiumonsiliconsciencekiryushijapan firstinternationalconferenceonadvancedmicrodeviceengineering
AT hanaizumiosamu firstinternationalconferenceonadvancedmicrodeviceengineering
AT unnomasafumi firstinternationalconferenceonadvancedmicrodeviceengineering
AT gunmadaigakuinternationaleducationandresearchcenterforsiliconscience firstinternationalconferenceonadvancedmicrodeviceengineering
AT gunmadaigakuadvancedtechnologyresearchcenter firstinternationalconferenceonadvancedmicrodeviceengineering
AT proquestfirm firstinternationalconferenceonadvancedmicrodeviceengineering
AT internationalconferenceonadvancedmicrodeviceengineeringkiryushijapan firstinternationalconferenceonadvancedmicrodeviceengineering
AT internationalsymposiumonsiliconsciencekiryushijapan internationalconferenceonadvancedmicrodeviceengineering
AT hanaizumiosamu internationalconferenceonadvancedmicrodeviceengineering
AT unnomasafumi internationalconferenceonadvancedmicrodeviceengineering
AT gunmadaigakuinternationaleducationandresearchcenterforsiliconscience internationalconferenceonadvancedmicrodeviceengineering
AT gunmadaigakuadvancedtechnologyresearchcenter internationalconferenceonadvancedmicrodeviceengineering
AT proquestfirm internationalconferenceonadvancedmicrodeviceengineering
AT internationalconferenceonadvancedmicrodeviceengineeringkiryushijapan internationalconferenceonadvancedmicrodeviceengineering
AT internationalsymposiumonsiliconsciencekiryushijapan isssamde2009
AT hanaizumiosamu isssamde2009
AT unnomasafumi isssamde2009
AT gunmadaigakuinternationaleducationandresearchcenterforsiliconscience isssamde2009
AT gunmadaigakuadvancedtechnologyresearchcenter isssamde2009
AT proquestfirm isssamde2009
AT internationalconferenceonadvancedmicrodeviceengineeringkiryushijapan isssamde2009
AT internationalsymposiumonsiliconsciencekiryushijapan isss2009
AT hanaizumiosamu isss2009
AT unnomasafumi isss2009
AT gunmadaigakuinternationaleducationandresearchcenterforsiliconscience isss2009
AT gunmadaigakuadvancedtechnologyresearchcenter isss2009
AT proquestfirm isss2009
AT internationalconferenceonadvancedmicrodeviceengineeringkiryushijapan isss2009
AT internationalsymposiumonsiliconsciencekiryushijapan amde2009
AT hanaizumiosamu amde2009
AT unnomasafumi amde2009
AT gunmadaigakuinternationaleducationandresearchcenterforsiliconscience amde2009
AT gunmadaigakuadvancedtechnologyresearchcenter amde2009
AT proquestfirm amde2009
AT internationalconferenceonadvancedmicrodeviceengineeringkiryushijapan amde2009
status_str n
ids_txt_mv (MiAaPQ)5001872512
(Au-PeEL)EBL1872512
(CaPaEBR)ebr10604228
(OCoLC)897640678
is_hierarchy_title Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /
author2_original_writing_str_mv noLinkedField
noLinkedField
noLinkedField
noLinkedField
noLinkedField
noLinkedField
_version_ 1792330802267160576
fullrecord <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02810nam a2200565 a 4500</leader><controlfield tag="001">5001872512</controlfield><controlfield tag="003">MiAaPQ</controlfield><controlfield tag="005">20200520144314.0</controlfield><controlfield tag="006">m o d | </controlfield><controlfield tag="007">cr cn|||||||||</controlfield><controlfield tag="008">120510s2011 sz a sb 101 0 eng d</controlfield><datafield tag="010" ind1=" " ind2=" "><subfield code="z"> 2012405162</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="z">9780878492176 (pbk.)</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="z">0878492178 (pbk.)</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="z">9780878492176</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783038134817 (electronic bk.)</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(MiAaPQ)5001872512</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(Au-PeEL)EBL1872512</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(CaPaEBR)ebr10604228</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)897640678</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">MiAaPQ</subfield><subfield code="c">MiAaPQ</subfield><subfield code="d">MiAaPQ</subfield></datafield><datafield tag="050" ind1=" " ind2="4"><subfield code="a">TK7871.15.S55</subfield><subfield code="b">I585 2009</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">621.381</subfield><subfield code="2">23</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">International Symposium on Silicon Science</subfield><subfield code="n">(5th :</subfield><subfield code="d">2009 :</subfield><subfield code="c">Kiryu-shi, Japan)</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Silicon science and advanced micro-device engineering I</subfield><subfield code="h">[electronic resource] :</subfield><subfield code="b">selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS &amp; AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /</subfield><subfield code="c">edited by Osamu Hanaizumi and Masafumi Unno.</subfield></datafield><datafield tag="246" ind1="3" ind2="0"><subfield code="a">5th International Symposium on Silicon Science</subfield></datafield><datafield tag="246" ind1="3" ind2=" "><subfield code="a">Fifth International Symposium on Silicon Science</subfield></datafield><datafield tag="246" ind1="3" ind2="0"><subfield code="a">International Symposium on Silicon Science</subfield></datafield><datafield tag="246" ind1="3" ind2="0"><subfield code="a">1st International Conference on Advanced Micro-Device Engineering</subfield></datafield><datafield tag="246" ind1="3" ind2=" "><subfield code="a">First International Conference on Advanced Micro-Device Engineering</subfield></datafield><datafield tag="246" ind1="3" ind2="0"><subfield code="a">International Conference on Advanced Micro-Device Engineering</subfield></datafield><datafield tag="246" ind1="3" ind2="0"><subfield code="a">ISSS &amp; AMDE 2009</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">ISSS 2009</subfield></datafield><datafield tag="246" ind1="3" ind2="0"><subfield code="a">AMDE 2009</subfield></datafield><datafield tag="260" ind1=" " ind2=" "><subfield code="a">Stafa-Zurich ;</subfield><subfield code="a">Enfield, N.H. :</subfield><subfield code="b">Trans Tech Publications,</subfield><subfield code="c">2011.</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">xii, 282 p. :</subfield><subfield code="b">ill.</subfield></datafield><datafield tag="440" ind1=" " ind2="0"><subfield code="a">Key engineering materials,</subfield><subfield code="x">1013-9826 ;</subfield><subfield code="v">v. 459</subfield></datafield><datafield tag="504" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and indexes.</subfield></datafield><datafield tag="533" ind1=" " ind2=" "><subfield code="a">Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Silicon</subfield><subfield code="v">Congresses.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Nanostructures</subfield><subfield code="v">Congresses.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Microelectronics</subfield><subfield code="v">Congresses.</subfield></datafield><datafield tag="655" ind1=" " ind2="4"><subfield code="a">Electronic books.</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Hanaizumi, Osamu.</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Unno, Masafumi.</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">Gunma Daigaku.</subfield><subfield code="b">International Education and Research Center for Silicon Science.</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">Gunma Daigaku.</subfield><subfield code="b">Advanced Technology Research Center.</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">ProQuest (Firm)</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">International Conference on Advanced Micro-Device Engineering</subfield><subfield code="n">(1st :</subfield><subfield code="d">2009 :</subfield><subfield code="c">Kiryu-shi, Japan)</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1872512</subfield><subfield code="z">Click to View</subfield></datafield></record></collection>

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