Silicon science and advanced micro-device engineering I : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / / edited by Osamu Hanaizumi and Masafumi Unno.

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Year of Publication:2011
Language:English
Series:Key engineering materials, v. 459
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Physical Description:xii, 282 p. :; ill.
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111 2 |a International Symposium on Silicon Science  |n (5th :  |d 2009 :  |c Kiryu-shi, Japan) 
245 1 0 |a Silicon science and advanced micro-device engineering I  |h [electronic resource] :  |b selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /  |c edited by Osamu Hanaizumi and Masafumi Unno. 
246 3 0 |a 5th International Symposium on Silicon Science 
246 3 |a Fifth International Symposium on Silicon Science 
246 3 0 |a International Symposium on Silicon Science 
246 3 0 |a 1st International Conference on Advanced Micro-Device Engineering 
246 3 |a First International Conference on Advanced Micro-Device Engineering 
246 3 0 |a International Conference on Advanced Micro-Device Engineering 
246 3 0 |a ISSS & AMDE 2009 
246 1 3 |a ISSS 2009 
246 3 0 |a AMDE 2009 
260 |a Stafa-Zurich ;  |a Enfield, N.H. :  |b Trans Tech Publications,  |c 2011. 
300 |a xii, 282 p. :  |b ill. 
440 0 |a Key engineering materials,  |x 1013-9826 ;  |v v. 459 
504 |a Includes bibliographical references and indexes. 
533 |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. 
650 0 |a Silicon  |v Congresses. 
650 0 |a Nanostructures  |v Congresses. 
650 0 |a Microelectronics  |v Congresses. 
655 4 |a Electronic books. 
700 1 |a Hanaizumi, Osamu. 
700 1 |a Unno, Masafumi. 
710 2 |a Gunma Daigaku.  |b International Education and Research Center for Silicon Science. 
710 2 |a Gunma Daigaku.  |b Advanced Technology Research Center. 
710 2 |a ProQuest (Firm) 
711 2 |a International Conference on Advanced Micro-Device Engineering  |n (1st :  |d 2009 :  |c Kiryu-shi, Japan) 
856 4 0 |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1872512  |z Click to View