Toward Energy-Efficient Physical Vapor Deposition : : Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation.
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Superior document: | Linköping Studies in Science and Technology. Dissertations Series ; v.2328 |
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Place / Publishing House: | Linköping : : Linkopings Universitet,, 2023. {copy}2023. |
Year of Publication: | 2023 |
Edition: | 1st ed. |
Language: | English |
Series: | Linköping Studies in Science and Technology. Dissertations Series
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Online Access: | |
Physical Description: | 1 online resource (60 pages) |
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