Effect of Metal Ion Irradiation on Hard Coating Synthesis by Physical Vapor Deposition.
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| Superior document: | Linköping Studies in Science and Technology. Dissertations Series ; v.2288 |
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| Place / Publishing House: | Linköping : : Linkopings Universitet,, 2023. {copy}2023. |
| Year of Publication: | 2023 |
| Edition: | 1st ed. |
| Language: | English |
| Series: | Linköping Studies in Science and Technology. Dissertations Series
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| Online Access: | |
| Physical Description: | 1 online resource (83 pages) |
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| ISBN: | 9789180750448 9789180750431 |
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| Hierarchical level: | Monograph |