Handbook of physical vapor deposition (PVD) processing / Donald M. Mattox.
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| Year of Publication: | 2010 |
| Edition: | 2nd ed. |
| Language: | English |
| Online Access: | |
| Physical Description: | xlvi, 746 p. :; ill. |
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| Bibliography: | Includes bibliographical references and index. |
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| ISBN: | 9780815520375 9780080946580 (electronic bk.) |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Donald M. Mattox. |