Handbook of physical vapor deposition (PVD) processing / Donald M. Mattox.

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Year of Publication:2010
Edition:2nd ed.
Language:English
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Physical Description:xlvi, 746 p. :; ill.
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100 1 |a Mattox, D. M. 
245 1 0 |a Handbook of physical vapor deposition (PVD) processing  |h [electronic resource] /  |c Donald M. Mattox. 
250 |a 2nd ed. 
260 |a Amsterdam :  |b Elsevier,  |c 2010. 
300 |a xlvi, 746 p. :  |b ill. 
504 |a Includes bibliographical references and index. 
533 |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. 
650 0 |a Physical vapor deposition  |v Handbooks, manuals, etc. 
655 4 |a Electronic books. 
710 2 |a ProQuest (Firm) 
856 4 0 |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=894706  |z Click to View