Chemical vapor deposition for nanotechnology / / Pietro Mandracci, editor.
Chemical vapor deposition (CVD) techniques have played a major role in the development of modern technology, and the rise of nanotechnology has further increased their importance, thanks to techniques such as atomic layer deposition (ALD) and vapor liquid solid growth, which are able to control the...
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| Place / Publishing House: | [Place of publication not identified] : : IntechOpen,, [2019] ©2019 |
| Year of Publication: | 2019 |
| Language: | English |
| Physical Description: | 1 online resource (164 pages) :; illustrations |
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Electronic
| DOAB Directory of Open Access Books | Available |