Metallic oxynitride thin films by reactive sputtering and related deposition methods : : processes, properties and applications / / edited by Filipe Vaz, Nicolas Martin & Martin Fenker.
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| Place / Publishing House: | Sharjah, United Arab Emirates ;, Oak Park, Illinois : : Bentham Science Publishers,, [2013] 2013 |
| Year of Publication: | 2013 |
| Language: | English |
| Online Access: | |
| Physical Description: | 1 online resource (363 pages) |
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| Bibliography: | Includes bibliographical references and indexes. |
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| ISBN: | 9781608051564 (ebook) 9781608051571 |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | edited by Filipe Vaz, Nicolas Martin & Martin Fenker. |