Metallic oxynitride thin films by reactive sputtering and related deposition methods : : processes, properties and applications / / edited by Filipe Vaz, Nicolas Martin & Martin Fenker.
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Place / Publishing House: | Sharjah, United Arab Emirates ;, Oak Park, Illinois : : Bentham Science Publishers,, [2013] 2013 |
Year of Publication: | 2013 |
Language: | English |
Online Access: | |
Physical Description: | 1 online resource (363 pages) |
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