Metallic oxynitride thin films by reactive sputtering and related deposition methods : : processes, properties and applications / / edited by Filipe Vaz, Nicolas Martin & Martin Fenker.
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| Place / Publishing House: | Sharjah, United Arab Emirates ;, Oak Park, Illinois : : Bentham Science Publishers,, [2013] 2013 |
| Year of Publication: | 2013 |
| Language: | English |
| Online Access: | |
| Physical Description: | 1 online resource (363 pages) |
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5001310821 |
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(MiAaPQ)5001310821 (Au-PeEL)EBL1310821 (CaPaEBR)ebr10756231 (OCoLC)854975260 |
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bib_alma |
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Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / edited by Filipe Vaz, Nicolas Martin & Martin Fenker. Sharjah, United Arab Emirates ; Oak Park, Illinois : Bentham Science Publishers, [2013] 2013 1 online resource (363 pages) text rdacontent computer rdamedia online resource rdacarrier Includes bibliographical references and indexes. Description based on online resource; title from PDF title page (ebrary, viewed September 20, 2013). Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. Thin films. Metals. Electronic books. Vaz, Filipe. Martin, Nicolas. Fenker, Martin. ProQuest (Firm) https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1310821 Click to View |
| language |
English |
| format |
eBook |
| author2 |
Vaz, Filipe. Martin, Nicolas. Fenker, Martin. |
| author_facet |
Vaz, Filipe. Martin, Nicolas. Fenker, Martin. |
| author2_variant |
f v fv n m nm m f mf |
| author2_role |
TeilnehmendeR TeilnehmendeR TeilnehmendeR |
| author_sort |
Vaz, Filipe. |
| title |
Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / |
| spellingShingle |
Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / |
| title_sub |
processes, properties and applications / |
| title_full |
Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / edited by Filipe Vaz, Nicolas Martin & Martin Fenker. |
| title_fullStr |
Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / edited by Filipe Vaz, Nicolas Martin & Martin Fenker. |
| title_full_unstemmed |
Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / edited by Filipe Vaz, Nicolas Martin & Martin Fenker. |
| title_auth |
Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / |
| title_new |
Metallic oxynitride thin films by reactive sputtering and related deposition methods : |
| title_sort |
metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / |
| publisher |
Bentham Science Publishers, |
| publishDate |
2013 |
| physical |
1 online resource (363 pages) |
| isbn |
9781608051564 (e-book) |
| callnumber-first |
Q - Science |
| callnumber-subject |
QC - Physics |
| callnumber-label |
QC176 |
| callnumber-sort |
QC 3176.83 M48 42013 |
| genre |
Electronic books. |
| genre_facet |
Electronic books. |
| url |
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1310821 |
| illustrated |
Not Illustrated |
| oclc_num |
854975260 |
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(MiAaPQ)5001310821 (Au-PeEL)EBL1310821 (CaPaEBR)ebr10756231 (OCoLC)854975260 |
| is_hierarchy_title |
Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / |
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1792330753762131968 |