Advanced Strategies in Thin Film Engineering by Magnetron Sputtering

Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reac...

Full description

Saved in:
Bibliographic Details
HerausgeberIn:
Sonstige:
Year of Publication:2020
Language:English
Physical Description:1 electronic resource (148 p.)
Tags: Add Tag
No Tags, Be the first to tag this record!