Toward Energy-Efficient Physical Vapor Deposition : : Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation.

Toward Energy-Efficient Physical Vapor Deposition : : Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation.

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Superior document:Linköping Studies in Science and Technology. Dissertations Series ; v.2328
:
Li, Xiao.
Place / Publishing House:Linköping : : Linkopings Universitet,, 2023.
{copy}2023.
Year of Publication:2023
Edition:1st ed.
Language:English
Series:Linköping Studies in Science and Technology. Dissertations Series
Online Access:
Physical Description:1 online resource (60 pages)
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(OCoLC)1382693725
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spelling Li, Xiao.
Toward Energy-Efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation.
1st ed.
Linköping : Linkopings Universitet, 2023.
{copy}2023.
1 online resource (60 pages)
text txt rdacontent
computer c rdamedia
online resource cr rdacarrier
Linköping Studies in Science and Technology. Dissertations Series ; v.2328
Intro -- COVER: -- ABSTRACT -- POPULÄRVETENSKAPLIG SAMMANFATTNING -- PREFACE -- Paper I -- Paper II -- Paper III -- Paper IV -- Paper V -- MY CONTRIBUTION TO THE PAPERS -- ACKNOWLEDGEMENTS -- TABLE OF CONTENTS -- CHAPTER I -- 1. INTRODUCTION -- CHAPTER II -- 2. THIN FILM DEPOSITION -- CHAPTER III -- 3. CHARACTERIZATION TECHNIQUES -- CHAPTER IV -- 4. SUMMARY AND CONTRIBUTION TO THE FIELD -- Papers.
Description based on publisher supplied metadata and other sources.
Electronic reproduction. Ann Arbor, Michigan : ProQuest Ebook Central, 2024. Available via World Wide Web. Access may be limited to ProQuest Ebook Central affiliated libraries.
Electronic books.
Print version: Li, Xiao Toward Energy-Efficient Physical Vapor Deposition Linköping : Linkopings Universitet,c2023 9789180752411
ProQuest (Firm)
Linköping Studies in Science and Technology. Dissertations Series
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=30553626 Click to View
language English
format eBook
author Li, Xiao.
spellingShingle Li, Xiao.
Toward Energy-Efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation.
Linköping Studies in Science and Technology. Dissertations Series ;
Intro -- COVER: -- ABSTRACT -- POPULÄRVETENSKAPLIG SAMMANFATTNING -- PREFACE -- Paper I -- Paper II -- Paper III -- Paper IV -- Paper V -- MY CONTRIBUTION TO THE PAPERS -- ACKNOWLEDGEMENTS -- TABLE OF CONTENTS -- CHAPTER I -- 1. INTRODUCTION -- CHAPTER II -- 2. THIN FILM DEPOSITION -- CHAPTER III -- 3. CHARACTERIZATION TECHNIQUES -- CHAPTER IV -- 4. SUMMARY AND CONTRIBUTION TO THE FIELD -- Papers.
author_facet Li, Xiao.
author_variant x l xl
author_sort Li, Xiao.
title Toward Energy-Efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation.
title_sub Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation.
title_full Toward Energy-Efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation.
title_fullStr Toward Energy-Efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation.
title_full_unstemmed Toward Energy-Efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation.
title_auth Toward Energy-Efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation.
title_new Toward Energy-Efficient Physical Vapor Deposition :
title_sort toward energy-efficient physical vapor deposition : routes for replacing substrate heating during magnetron sputtering by employing metal ion irradiation.
series Linköping Studies in Science and Technology. Dissertations Series ;
series2 Linköping Studies in Science and Technology. Dissertations Series ;
publisher Linkopings Universitet,
publishDate 2023
physical 1 online resource (60 pages)
edition 1st ed.
contents Intro -- COVER: -- ABSTRACT -- POPULÄRVETENSKAPLIG SAMMANFATTNING -- PREFACE -- Paper I -- Paper II -- Paper III -- Paper IV -- Paper V -- MY CONTRIBUTION TO THE PAPERS -- ACKNOWLEDGEMENTS -- TABLE OF CONTENTS -- CHAPTER I -- 1. INTRODUCTION -- CHAPTER II -- 2. THIN FILM DEPOSITION -- CHAPTER III -- 3. CHARACTERIZATION TECHNIQUES -- CHAPTER IV -- 4. SUMMARY AND CONTRIBUTION TO THE FIELD -- Papers.
isbn 9789180752428
9789180752411
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=30553626
illustrated Not Illustrated
oclc_num 1382693725
work_keys_str_mv AT lixiao towardenergyefficientphysicalvapordepositionroutesforreplacingsubstrateheatingduringmagnetronsputteringbyemployingmetalionirradiation
status_str n
ids_txt_mv (MiAaPQ)50030553626
(Au-PeEL)EBL30553626
(OCoLC)1382693725
carrierType_str_mv cr
hierarchy_parent_title Linköping Studies in Science and Technology. Dissertations Series ; v.2328
is_hierarchy_title Toward Energy-Efficient Physical Vapor Deposition : Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation.
container_title Linköping Studies in Science and Technology. Dissertations Series ; v.2328
marc_error Info : MARC8 translation shorter than ISO-8859-1, choosing MARC8. --- [ 856 : z ]
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