Toward Energy-Efficient Physical Vapor Deposition : : Routes for Replacing Substrate Heating During Magnetron Sputtering by Employing Metal Ion Irradiation.
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| Superior document: | Linköping Studies in Science and Technology. Dissertations Series ; v.2328 |
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| Place / Publishing House: | Linköping : : Linkopings Universitet,, 2023. {copy}2023. |
| Year of Publication: | 2023 |
| Edition: | 1st ed. |
| Language: | English |
| Series: | Linköping Studies in Science and Technology. Dissertations Series
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| Online Access: | |
| Physical Description: | 1 online resource (60 pages) |
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Table of Contents:
- Intro
- COVER:
- ABSTRACT
- POPULÄRVETENSKAPLIG SAMMANFATTNING
- PREFACE
- Paper I
- Paper II
- Paper III
- Paper IV
- Paper V
- MY CONTRIBUTION TO THE PAPERS
- ACKNOWLEDGEMENTS
- TABLE OF CONTENTS
- CHAPTER I
- 1. INTRODUCTION
- CHAPTER II
- 2. THIN FILM DEPOSITION
- CHAPTER III
- 3. CHARACTERIZATION TECHNIQUES
- CHAPTER IV
- 4. SUMMARY AND CONTRIBUTION TO THE FIELD
- Papers.