Ion implantation and activation. / Volume 1 / / authored by Kunihiro Suzuki.
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Superior document: | Ion implantation and activation ; volume 1 |
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Place / Publishing House: | Sharjah, U.A.E. ;, Oak Park, Illinois : : Bentham Science Publishers,, [2013] 2013 |
Year of Publication: | 2013 |
Language: | English |
Series: | Ion implantation and activation.
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Online Access: | |
Physical Description: | 1 online resource (464 pages) :; illustrations. |
Notes: | Includes index. |
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