Ion implantation and activation.

Ion implantation and activation. / Volume 1 / / authored by Kunihiro Suzuki.

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Bibliographic Details
Superior document:Ion implantation and activation ; volume 1
:
Suzuki, Kunihiro.
Place / Publishing House:Sharjah, U.A.E. ;, Oak Park, Illinois : : Bentham Science Publishers,, [2013]
2013
Year of Publication:2013
Language:English
Series:Ion implantation and activation.
Online Access:
Physical Description:1 online resource (464 pages) :; illustrations.
Notes:Includes index.
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id 5001531933
ctrlnum (MiAaPQ)5001531933
(Au-PeEL)EBL1531933
(CaPaEBR)ebr10795309
(OCoLC)862612482
collection bib_alma
record_format marc
spelling Suzuki, Kunihiro.
Ion implantation and activation. Volume 1 / authored by Kunihiro Suzuki.
Sharjah, U.A.E. ; Oak Park, Illinois : Bentham Science Publishers, [2013]
2013
1 online resource (464 pages) : illustrations.
text rdacontent
computer rdamedia
online resource rdacarrier
Ion implantation and activation ; volume 1
Includes index.
Description based on online resource; title from PDF title page (ebrary, viewed December 2, 2013).
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Alloys.
Ion implantation.
Semiconductors.
Electronic books.
ProQuest (Firm)
Ion implantation and activation.
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1531933 Click to View
language English
format eBook
author Suzuki, Kunihiro.
spellingShingle Suzuki, Kunihiro.
Ion implantation and activation.
Ion implantation and activation ;
author_facet Suzuki, Kunihiro.
author_variant k s ks
author_sort Suzuki, Kunihiro.
title Ion implantation and activation.
title_full Ion implantation and activation. Volume 1 / authored by Kunihiro Suzuki.
title_fullStr Ion implantation and activation. Volume 1 / authored by Kunihiro Suzuki.
title_full_unstemmed Ion implantation and activation. Volume 1 / authored by Kunihiro Suzuki.
title_auth Ion implantation and activation.
title_new Ion implantation and activation.
title_sort ion implantation and activation.
series Ion implantation and activation ;
series2 Ion implantation and activation ;
publisher Bentham Science Publishers,
publishDate 2013
physical 1 online resource (464 pages) : illustrations.
isbn 9781608057818 (e-book)
callnumber-first T - Technology
callnumber-subject TN - Mining Engineering and Metallurgy
callnumber-label TN23
callnumber-sort TN 223 S89 42013
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1531933
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 622 - Mining & related operations
dewey-full 622.08
dewey-sort 3622.08
dewey-raw 622.08
dewey-search 622.08
oclc_num 862612482
work_keys_str_mv AT suzukikunihiro ionimplantationandactivationvolume1
status_str n
ids_txt_mv (MiAaPQ)5001531933
(Au-PeEL)EBL1531933
(CaPaEBR)ebr10795309
(OCoLC)862612482
hierarchy_parent_title Ion implantation and activation ; volume 1
is_hierarchy_title Ion implantation and activation.
container_title Ion implantation and activation ; volume 1
_version_ 1792330762922491904
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