Ion implantation and activation. / Volume 1 / / authored by Kunihiro Suzuki.
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| Superior document: | Ion implantation and activation ; volume 1 |
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| Place / Publishing House: | Sharjah, U.A.E. ;, Oak Park, Illinois : : Bentham Science Publishers,, [2013] 2013 |
| Year of Publication: | 2013 |
| Language: | English |
| Series: | Ion implantation and activation.
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| Online Access: | |
| Physical Description: | 1 online resource (464 pages) :; illustrations. |
| Notes: | Includes index. |
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| ISBN: | 9781608057818 (ebook) 9781608057825 |
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| Hierarchical level: | Monograph |
| Statement of Responsibility: | authored by Kunihiro Suzuki. |