Ion implantation and activation.

Ion implantation and activation. / Volume 1 / / authored by Kunihiro Suzuki.

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Bibliographic Details
Superior document:Ion implantation and activation ; volume 1
:
Suzuki, Kunihiro.
Place / Publishing House:Sharjah, U.A.E. ;, Oak Park, Illinois : : Bentham Science Publishers,, [2013]
2013
Year of Publication:2013
Language:English
Series:Ion implantation and activation.
Online Access:
Physical Description:1 online resource (464 pages) :; illustrations.
Notes:Includes index.
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245 1 0 |a Ion implantation and activation.  |n Volume 1 /  |c authored by Kunihiro Suzuki. 
264 1 |a Sharjah, U.A.E. ;  |a Oak Park, Illinois :  |b Bentham Science Publishers,  |c [2013] 
264 4 |c 2013 
300 |a 1 online resource (464 pages) :  |b illustrations. 
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490 1 |a Ion implantation and activation ;  |v volume 1 
500 |a Includes index. 
588 |a Description based on online resource; title from PDF title page (ebrary, viewed December 2, 2013). 
590 |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. 
650 0 |a Alloys. 
650 0 |a Ion implantation. 
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856 4 0 |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1531933  |z Click to View 

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