Ion implantation and activation. / Volume 3 / / Kunihiro Suzuki.
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| Place / Publishing House: | Sharjah : : Bentham Science Publishers,, 2013. |
| Year of Publication: | 2013 |
| Language: | English |
| Online Access: | |
| Physical Description: | 1 online resource (212 pages) :; illustrations |
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| Bibliography: | Includes bibliographical references and index. |
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| ISBN: | 9781608057146 9781608057924 |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Kunihiro Suzuki. |