Ion Implantation / / edited by Mark Goorsky.
Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new material...
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| Place / Publishing House: | London, England : : IntechOpen,, 2012. |
| Year of Publication: | 2012 |
| Language: | English |
| Physical Description: | 1 online resource (448 pages) :; illustrations |
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Electronic
| DOAB Directory of Open Access Books | Available |