Ion implantation and activation. / Volume 3 / / Kunihiro Suzuki.
Saved in:
: | |
---|---|
Place / Publishing House: | Sharjah : : Bentham Science Publishers,, 2013. |
Year of Publication: | 2013 |
Language: | English |
Online Access: | |
Physical Description: | 1 online resource (212 pages) :; illustrations |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
LEADER | 01443nam a22003731i 4500 | ||
---|---|---|---|
001 | 5001572233 | ||
003 | MiAaPQ | ||
005 | 20200520144314.0 | ||
006 | m o d | | ||
007 | cr cnu|||||||| | ||
008 | 121011s2013 ts a ob 001 1 eng d | ||
020 | |z 9781608057146 | ||
020 | |a 9781608057924 |q (electronic bk.) | ||
035 | |a (MiAaPQ)5001572233 | ||
035 | |a (Au-PeEL)EBL1572233 | ||
035 | |a (CaPaEBR)ebr10817749 | ||
035 | |a (OCoLC)865331807 | ||
040 | |a MiAaPQ |b eng |e rda |e pn |c MiAaPQ |d MiAaPQ | ||
050 | 4 | |a QC702.7.I55 |b S89 2013 | |
100 | 1 | |a Suzuki, Kunihiro. | |
245 | 1 | 0 | |a Ion implantation and activation. |n Volume 3 / |c Kunihiro Suzuki. |
264 | 1 | |a Sharjah : |b Bentham Science Publishers, |c 2013. | |
300 | |a 1 online resource (212 pages) : |b illustrations | ||
336 | |a text |2 rdacontent | ||
337 | |a computer |2 rdamedia | ||
338 | |a online resource |2 rdacarrier | ||
504 | |a Includes bibliographical references and index. | ||
588 | |a Description based on online resource; title from PDF title page (ebrary, viewed January 12, 2014). | ||
590 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
650 | 0 | |a Ion implantation. | |
650 | 0 | |a Ion accelerators. | |
655 | 4 | |a Electronic books. | |
797 | 2 | |a ProQuest (Firm) | |
856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1572233 |z Click to View |