Silicon technologies : ion implantation and thermal treatment / / edited by Annie Baudrant.
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
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Year of Publication: | 2011 |
Language: | English |
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Physical Description: | xvii, 337 p. :; ill. |
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