Silicon technologies : ion implantation and thermal treatment /

Silicon technologies : ion implantation and thermal treatment / / edited by Annie Baudrant.

The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.

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ProQuest (Firm)
TeilnehmendeR:
Baudrant, Annie.
ProQuest (Firm)
Year of Publication:2011
Language:English
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Physical Description:xvii, 337 p. :; ill.
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spelling Silicon technologies [electronic resource] : ion implantation and thermal treatment / edited by Annie Baudrant.
London : ISTE ; Hoboken, N.J. : Wiley, 2011.
xvii, 337 p. : ill.
Includes bibliographical references and index.
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Semiconductor doping.
Ion implantation.
Semiconductors Heat treatment.
Electronic books.
Baudrant, Annie.
ProQuest (Firm)
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1124704 Click to View
language English
format Electronic
eBook
author2 Baudrant, Annie.
ProQuest (Firm)
author_facet Baudrant, Annie.
ProQuest (Firm)
ProQuest (Firm)
author2_variant a b ab
author2_role TeilnehmendeR
TeilnehmendeR
author_corporate ProQuest (Firm)
author_sort Baudrant, Annie.
title Silicon technologies ion implantation and thermal treatment /
spellingShingle Silicon technologies ion implantation and thermal treatment /
title_sub ion implantation and thermal treatment /
title_full Silicon technologies [electronic resource] : ion implantation and thermal treatment / edited by Annie Baudrant.
title_fullStr Silicon technologies [electronic resource] : ion implantation and thermal treatment / edited by Annie Baudrant.
title_full_unstemmed Silicon technologies [electronic resource] : ion implantation and thermal treatment / edited by Annie Baudrant.
title_auth Silicon technologies ion implantation and thermal treatment /
title_new Silicon technologies
title_sort silicon technologies ion implantation and thermal treatment /
publisher ISTE ; Wiley,
publishDate 2011
physical xvii, 337 p. : ill.
isbn 9781118601112 (electronic bk.)
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7871
callnumber-sort TK 47871.85 S5485 42011
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1124704
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.3815/2
dewey-sort 3621.3815 12
dewey-raw 621.3815/2
dewey-search 621.3815/2
oclc_num 828298716
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is_hierarchy_title Silicon technologies ion implantation and thermal treatment /
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