Silicon technologies : ion implantation and thermal treatment / / edited by Annie Baudrant.
The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion.
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Year of Publication: | 2011 |
Language: | English |
Online Access: | |
Physical Description: | xvii, 337 p. :; ill. |
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LEADER | 01640nam a2200397 a 4500 | ||
---|---|---|---|
001 | 5001124704 | ||
003 | MiAaPQ | ||
005 | 20200520144314.0 | ||
006 | m o d | | ||
007 | cr cn||||||||| | ||
008 | 110316s2011 enka sb 001 0 eng d | ||
010 | |z 2011008131 | ||
020 | |z 9781848212312 (hc) | ||
020 | |z 1848212313 | ||
020 | |a 9781118601112 (electronic bk.) | ||
035 | |a (MiAaPQ)5001124704 | ||
035 | |a (Au-PeEL)EBL1124704 | ||
035 | |a (CaPaEBR)ebr10660607 | ||
035 | |a (CaONFJC)MIL450003 | ||
035 | |a (OCoLC)828298716 | ||
040 | |a MiAaPQ |c MiAaPQ |d MiAaPQ | ||
050 | 4 | |a TK7871.85 |b .S5485 2011 | |
082 | 0 | 4 | |a 621.3815/2 |2 22 |
245 | 0 | 0 | |a Silicon technologies |h [electronic resource] : |b ion implantation and thermal treatment / |c edited by Annie Baudrant. |
260 | |a London : |b ISTE ; |a Hoboken, N.J. : |b Wiley, |c 2011. | ||
300 | |a xvii, 337 p. : |b ill. | ||
504 | |a Includes bibliographical references and index. | ||
520 | |a The main purpose of this book is to remind new engineers in silicon foundry, the fundamental physical and chemical rules in major Front end treatments: oxidation, epitaxy, ion implantation and impurities diffusion. | ||
533 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
650 | 0 | |a Semiconductor doping. | |
650 | 0 | |a Ion implantation. | |
650 | 0 | |a Semiconductors |x Heat treatment. | |
655 | 4 | |a Electronic books. | |
700 | 1 | |a Baudrant, Annie. | |
710 | 2 | |a ProQuest (Firm) | |
856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1124704 |z Click to View |