Micromachining techniques for fabrication of micro and nano structures / / Mojtaba Kahrizi, editor.
Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromac...
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Place / Publishing House: | [Place of publication not identified] : : InTech,, [2012] ©2012 |
Year of Publication: | 2012 |
Language: | English |
Physical Description: | 1 online resource (314 pages) :; illustrations |
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