Micromachining techniques for fabrication of micro and nano structures / / Mojtaba Kahrizi, editor.
Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromac...
Saved in:
| TeilnehmendeR: | |
|---|---|
| Place / Publishing House: | [Place of publication not identified] : : InTech,, [2012] ©2012 |
| Year of Publication: | 2012 |
| Language: | English |
| Physical Description: | 1 online resource (314 pages) :; illustrations |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Electronic
| DOAB Directory of Open Access Books | Available |