Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / / Bijoy Bhattacharyya.
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| Superior document: | Micro & Nano Technologies Series |
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| VerfasserIn: | |
| Place / Publishing House: | Amsterdam, [Netherlands] : : William Andrew,, 2015. 2015 |
| Year of Publication: | 2015 |
| Language: | English |
| Series: | Micro & nano technologies.
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| Online Access: | |
| Physical Description: | 1 online resource (297 pages) :; illustrations, graphs. |
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| Bibliography: | Includes bibliographical references at the end of each chapters and index. |
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| ISBN: | 9780323327374 9780323352888 |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Bijoy Bhattacharyya. |