Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / / Bijoy Bhattacharyya.

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Superior document:Micro & Nano Technologies Series
VerfasserIn:
Place / Publishing House:Amsterdam, [Netherlands] : : William Andrew,, 2015.
2015
Year of Publication:2015
Language:English
Series:Micro & nano technologies.
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Physical Description:1 online resource (297 pages) :; illustrations, graphs.
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ctrlnum (MiAaPQ)5002012265
(Au-PeEL)EBL2012265
(CaPaEBR)ebr11042975
(CaONFJC)MIL768354
(OCoLC)907467274
collection bib_alma
record_format marc
spelling Bhattacharyya, Bijoy, author.
Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / Bijoy Bhattacharyya.
Amsterdam, [Netherlands] : William Andrew, 2015.
2015
1 online resource (297 pages) : illustrations, graphs.
text rdacontent
computer rdamedia
online resource rdacarrier
Micro & Nano Technologies Series
Includes bibliographical references at the end of each chapters and index.
Description based on online resource; title from PDF title page (ebrary, viewed April 24, 2015).
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Micromachining.
Nanotechnology.
Microelectromechanical systems.
Electronic books.
Print version: Bhattacharyya, Bijoy. Electrochemical micromachining for nanofabrication, MEMS and nanotechnology. Amsterdam, [Netherlands] : William Andrew, c2015 xxv, 270 pages Micro & nano technologies. 9780323327374
ProQuest (Firm)
Micro & nano technologies.
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=2012265 Click to View
language English
format eBook
author Bhattacharyya, Bijoy,
spellingShingle Bhattacharyya, Bijoy,
Electrochemical micromachining for nanofabrication, MEMS and nanotechnology /
Micro & Nano Technologies Series
author_facet Bhattacharyya, Bijoy,
author_variant b b bb
author_role VerfasserIn
author_sort Bhattacharyya, Bijoy,
title Electrochemical micromachining for nanofabrication, MEMS and nanotechnology /
title_full Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / Bijoy Bhattacharyya.
title_fullStr Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / Bijoy Bhattacharyya.
title_full_unstemmed Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / Bijoy Bhattacharyya.
title_auth Electrochemical micromachining for nanofabrication, MEMS and nanotechnology /
title_new Electrochemical micromachining for nanofabrication, MEMS and nanotechnology /
title_sort electrochemical micromachining for nanofabrication, mems and nanotechnology /
series Micro & Nano Technologies Series
series2 Micro & Nano Technologies Series
publisher William Andrew,
publishDate 2015
physical 1 online resource (297 pages) : illustrations, graphs.
isbn 9780323352888
9780323327374
callnumber-first T - Technology
callnumber-subject TJ - Mechanical Engineering and Machinery
callnumber-label TJ1191
callnumber-sort TJ 41191.5 B438 42015
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=2012265
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 670 - Manufacturing
dewey-ones 671 - Metalworking & primary metal products
dewey-full 671.35
dewey-sort 3671.35
dewey-raw 671.35
dewey-search 671.35
oclc_num 907467274
work_keys_str_mv AT bhattacharyyabijoy electrochemicalmicromachiningfornanofabricationmemsandnanotechnology
status_str n
ids_txt_mv (MiAaPQ)5002012265
(Au-PeEL)EBL2012265
(CaPaEBR)ebr11042975
(CaONFJC)MIL768354
(OCoLC)907467274
hierarchy_parent_title Micro & Nano Technologies Series
is_hierarchy_title Electrochemical micromachining for nanofabrication, MEMS and nanotechnology /
container_title Micro & Nano Technologies Series
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