Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / / Bijoy Bhattacharyya.
Saved in:
Superior document: | Micro & Nano Technologies Series |
---|---|
VerfasserIn: | |
Place / Publishing House: | Amsterdam, [Netherlands] : : William Andrew,, 2015. 2015 |
Year of Publication: | 2015 |
Language: | English |
Series: | Micro & nano technologies.
|
Online Access: | |
Physical Description: | 1 online resource (297 pages) :; illustrations, graphs. |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
LEADER | 01994nam a2200457 i 4500 | ||
---|---|---|---|
001 | 5002012265 | ||
003 | MiAaPQ | ||
005 | 20200520144314.0 | ||
006 | m o d | | ||
007 | cr cnu|||||||| | ||
008 | 150424t20152015ne a ob 001 0 eng d | ||
020 | |z 9780323327374 | ||
020 | |a 9780323352888 |q (electronic bk.) | ||
035 | |a (MiAaPQ)5002012265 | ||
035 | |a (Au-PeEL)EBL2012265 | ||
035 | |a (CaPaEBR)ebr11042975 | ||
035 | |a (CaONFJC)MIL768354 | ||
035 | |a (OCoLC)907467274 | ||
040 | |a MiAaPQ |b eng |e rda |e pn |c MiAaPQ |d MiAaPQ | ||
050 | 4 | |a TJ1191.5 |b .B438 2015 | |
082 | 0 | |a 671.35 |2 23 | |
100 | 1 | |a Bhattacharyya, Bijoy, |e author. | |
245 | 1 | 0 | |a Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / |c Bijoy Bhattacharyya. |
264 | 1 | |a Amsterdam, [Netherlands] : |b William Andrew, |c 2015. | |
264 | 4 | |c 2015 | |
300 | |a 1 online resource (297 pages) : |b illustrations, graphs. | ||
336 | |a text |2 rdacontent | ||
337 | |a computer |2 rdamedia | ||
338 | |a online resource |2 rdacarrier | ||
490 | 1 | |a Micro & Nano Technologies Series | |
504 | |a Includes bibliographical references at the end of each chapters and index. | ||
588 | |a Description based on online resource; title from PDF title page (ebrary, viewed April 24, 2015). | ||
590 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
650 | 0 | |a Micromachining. | |
650 | 0 | |a Nanotechnology. | |
650 | 0 | |a Microelectromechanical systems. | |
655 | 4 | |a Electronic books. | |
776 | 0 | 8 | |i Print version: |a Bhattacharyya, Bijoy. |t Electrochemical micromachining for nanofabrication, MEMS and nanotechnology. |d Amsterdam, [Netherlands] : William Andrew, c2015 |h xxv, 270 pages |k Micro & nano technologies. |z 9780323327374 |
797 | 2 | |a ProQuest (Firm) | |
830 | 0 | |a Micro & nano technologies. | |
856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=2012265 |z Click to View |