Micromachining techniques for fabrication of micro and nano structures / / Mojtaba Kahrizi, editor.
Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromac...
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Place / Publishing House: | [Place of publication not identified] : : InTech,, [2012] ©2012 |
Year of Publication: | 2012 |
Language: | English |
Physical Description: | 1 online resource (314 pages) :; illustrations |
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(CKB)3230000000076419 (NjHacI)993230000000076419 (oapen)https://directory.doabooks.org/handle/20.500.12854/65516 (EXLCZ)993230000000076419 |
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Kahrizi, Mojtaba edt Micromachining techniques for fabrication of micro and nano structures / Mojtaba Kahrizi, editor. IntechOpen 2012 [Place of publication not identified] : InTech, [2012] ©2012 1 online resource (314 pages) : illustrations text txt rdacontent computer c rdamedia online resource cr rdacarrier Description based on: online resource; title from PDF information screen (InTech, viewed October 13, 2022). Includes bibliographical references. Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry. English Micromachining. Analytical chemistry 953-307-906-1 Kahrizi, Mojtaba, editor. |
language |
English |
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eBook |
author2 |
Kahrizi, Mojtaba, |
author_facet |
Kahrizi, Mojtaba, |
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TeilnehmendeR |
title |
Micromachining techniques for fabrication of micro and nano structures / |
spellingShingle |
Micromachining techniques for fabrication of micro and nano structures / |
title_full |
Micromachining techniques for fabrication of micro and nano structures / Mojtaba Kahrizi, editor. |
title_fullStr |
Micromachining techniques for fabrication of micro and nano structures / Mojtaba Kahrizi, editor. |
title_full_unstemmed |
Micromachining techniques for fabrication of micro and nano structures / Mojtaba Kahrizi, editor. |
title_auth |
Micromachining techniques for fabrication of micro and nano structures / |
title_new |
Micromachining techniques for fabrication of micro and nano structures / |
title_sort |
micromachining techniques for fabrication of micro and nano structures / |
publisher |
IntechOpen InTech, |
publishDate |
2012 |
physical |
1 online resource (314 pages) : illustrations |
isbn |
953-51-6095-8 953-307-906-1 |
callnumber-first |
T - Technology |
callnumber-subject |
TJ - Mechanical Engineering and Machinery |
callnumber-label |
TJ1191 |
callnumber-sort |
TJ 41191.5 M537 42012 |
illustrated |
Illustrated |
dewey-hundreds |
600 - Technology |
dewey-tens |
670 - Manufacturing |
dewey-ones |
671 - Metalworking & primary metal products |
dewey-full |
671.35 |
dewey-sort |
3671.35 |
dewey-raw |
671.35 |
dewey-search |
671.35 |
work_keys_str_mv |
AT kahrizimojtaba micromachiningtechniquesforfabricationofmicroandnanostructures |
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n |
ids_txt_mv |
(CKB)3230000000076419 (NjHacI)993230000000076419 (oapen)https://directory.doabooks.org/handle/20.500.12854/65516 (EXLCZ)993230000000076419 |
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Micromachining techniques for fabrication of micro and nano structures / |
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_version_ |
1796648786826625024 |
fullrecord |
<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01069nam a2200301 i 4500</leader><controlfield tag="001">993547452304498</controlfield><controlfield tag="005">20221013203730.0</controlfield><controlfield tag="006">m o d </controlfield><controlfield tag="007">cr |||||||||||</controlfield><controlfield tag="008">221013s2012 xx a ob 000 0 eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">953-51-6095-8</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(CKB)3230000000076419</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(NjHacI)993230000000076419</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(oapen)https://directory.doabooks.org/handle/20.500.12854/65516</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(EXLCZ)993230000000076419</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">NjHacI</subfield><subfield code="b">eng</subfield><subfield code="e">rda</subfield><subfield code="c">NjHacl</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="050" ind1=" " ind2="4"><subfield code="a">TJ1191.5</subfield><subfield code="b">.M537 2012</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">671.35</subfield><subfield code="2">23</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Kahrizi, Mojtaba</subfield><subfield code="4">edt</subfield></datafield><datafield tag="245" ind1="0" ind2="0"><subfield code="a">Micromachining techniques for fabrication of micro and nano structures /</subfield><subfield code="c">Mojtaba Kahrizi, editor.</subfield></datafield><datafield tag="260" ind1=" " ind2=" "><subfield code="b">IntechOpen</subfield><subfield code="c">2012</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">[Place of publication not identified] :</subfield><subfield code="b">InTech,</subfield><subfield code="c">[2012]</subfield></datafield><datafield tag="264" ind1=" " ind2="4"><subfield code="c">©2012</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (314 pages) :</subfield><subfield code="b">illustrations</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">computer</subfield><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">online resource</subfield><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="588" ind1=" " ind2=" "><subfield code="a">Description based on: online resource; title from PDF information screen (InTech, viewed October 13, 2022).</subfield></datafield><datafield tag="504" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references.</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.</subfield></datafield><datafield tag="546" ind1=" " ind2=" "><subfield code="a">English</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Micromachining.</subfield></datafield><datafield tag="653" ind1=" " ind2=" "><subfield code="a">Analytical chemistry</subfield></datafield><datafield tag="776" ind1=" " ind2=" "><subfield code="z">953-307-906-1</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kahrizi, Mojtaba,</subfield><subfield code="e">editor.</subfield></datafield><datafield tag="906" ind1=" " ind2=" "><subfield code="a">BOOK</subfield></datafield><datafield tag="ADM" ind1=" " ind2=" "><subfield code="b">2023-02-22 20:44:04 Europe/Vienna</subfield><subfield code="f">system</subfield><subfield code="c">marc21</subfield><subfield code="a">2012-12-09 08:17:33 Europe/Vienna</subfield><subfield code="g">false</subfield></datafield><datafield tag="AVE" ind1=" " ind2=" "><subfield code="i">DOAB Directory of Open Access Books</subfield><subfield code="P">DOAB Directory of Open Access Books</subfield><subfield code="x">https://eu02.alma.exlibrisgroup.com/view/uresolver/43ACC_OEAW/openurl?u.ignore_date_coverage=true&portfolio_pid=5338538240004498&Force_direct=true</subfield><subfield code="Z">5338538240004498</subfield><subfield code="b">Available</subfield><subfield code="8">5338538240004498</subfield></datafield></record></collection> |