Micro/Nano Manufacturing
Micro manufacturing involves dealing with the fabrication of structures in the size range of 0.1 to 1000 µm. The scope of nano manufacturing extends the size range of manufactured features to even smaller length scales—below 100 nm. A strict borderline between micro and nano manufacturing can hardly...
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| Year of Publication: | 2019 |
| Language: | English |
| Physical Description: | 1 electronic resource (208 p.) |
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Electronic
| DOAB Directory of Open Access Books | Available |