Micro/Nano Manufacturing / / edited by Guido Tosello and Hans Hansen.

Micro- and nano-scale manufacturing has been the subject of ever more research and industrial focus over the past 10 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been devel...

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Bibliographic Details
TeilnehmendeR:
Place / Publishing House:Basel, Switzerland : : MDPI - Multidisciplinary Digital Publishing Institute,, 2017.
Year of Publication:2017
Language:English
Physical Description:1 online resource (190 pages) :; illustrations
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