Micro/Nano Manufacturing / / edited by Guido Tosello and Hans Hansen.
Micro- and nano-scale manufacturing has been the subject of ever more research and industrial focus over the past 10 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been devel...
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Place / Publishing House: | Basel, Switzerland : : MDPI - Multidisciplinary Digital Publishing Institute,, 2017. |
Year of Publication: | 2017 |
Language: | English |
Physical Description: | 1 online resource (190 pages) :; illustrations |
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