Lithography : main techniques / / edited by Stefan Landis.
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologie...
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| Year of Publication: | 2011 |
| Language: | English |
| Online Access: | |
| Physical Description: | xxv, 377 p. :; ill. (some col.) |
| Notes: | Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. |
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