Lithography : main techniques /

Lithography : main techniques / / edited by Stefan Landis.

"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologie...

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ProQuest (Firm)
TeilnehmendeR:
Landis, Stefan.
ProQuest (Firm)
Year of Publication:2011
Language:English
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Physical Description:xxv, 377 p. :; ill. (some col.)
Notes:Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier.
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id 5001143629
ctrlnum (MiAaPQ)5001143629
(Au-PeEL)EBL1143629
(CaPaEBR)ebr10671590
(CaONFJC)MIL462802
(OCoLC)830161630
collection bib_alma
fullrecord <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01871nam a2200385 a 4500</leader><controlfield tag="001">5001143629</controlfield><controlfield tag="003">MiAaPQ</controlfield><controlfield tag="005">20200520144314.0</controlfield><controlfield tag="006">m o d | </controlfield><controlfield tag="007">cr cn|||||||||</controlfield><controlfield tag="008">101013s2011 enka sb 001 0 eng d</controlfield><datafield tag="010" ind1=" " ind2=" "><subfield code="z"> 2010040731</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="z">9781848212022 (hardback)</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="z">184821202X (hardback)</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781118621233 (electronic bk.)</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(MiAaPQ)5001143629</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(Au-PeEL)EBL1143629</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(CaPaEBR)ebr10671590</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(CaONFJC)MIL462802</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)830161630</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">MiAaPQ</subfield><subfield code="c">MiAaPQ</subfield><subfield code="d">MiAaPQ</subfield></datafield><datafield tag="050" ind1=" " ind2="4"><subfield code="a">TK7872.M3</subfield><subfield code="b">L58 2011</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">621.3815/31</subfield><subfield code="2">22</subfield></datafield><datafield tag="245" ind1="0" ind2="0"><subfield code="a">Lithography</subfield><subfield code="h">[electronic resource] :</subfield><subfield code="b">main techniques /</subfield><subfield code="c">edited by Stefan Landis.</subfield></datafield><datafield tag="260" ind1=" " ind2=" "><subfield code="a">London :</subfield><subfield code="b">ISTE ;</subfield><subfield code="a">Hoboken, N.J. :</subfield><subfield code="b">Wiley,</subfield><subfield code="c">2011.</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">xxv, 377 p. :</subfield><subfield code="b">ill. (some col.)</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier.</subfield></datafield><datafield tag="504" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index.</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"--</subfield><subfield code="c">Provided by publisher.</subfield></datafield><datafield tag="533" ind1=" " ind2=" "><subfield code="a">Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Microlithography.</subfield></datafield><datafield tag="655" ind1=" " ind2="4"><subfield code="a">Electronic books.</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Landis, Stefan.</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">ProQuest (Firm)</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1143629</subfield><subfield code="z">Click to View</subfield></datafield></record></collection>
record_format marc
spelling Lithography [electronic resource] : main techniques / edited by Stefan Landis.
London : ISTE ; Hoboken, N.J. : Wiley, 2011.
xxv, 377 p. : ill. (some col.)
Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier.
Includes bibliographical references and index.
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- Provided by publisher.
Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
Microlithography.
Electronic books.
Landis, Stefan.
ProQuest (Firm)
https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1143629 Click to View
language English
format Electronic
eBook
author2 Landis, Stefan.
ProQuest (Firm)
author_facet Landis, Stefan.
ProQuest (Firm)
ProQuest (Firm)
author2_variant s l sl
author2_role TeilnehmendeR
TeilnehmendeR
author_corporate ProQuest (Firm)
author_sort Landis, Stefan.
title Lithography main techniques /
spellingShingle Lithography main techniques /
title_sub main techniques /
title_full Lithography [electronic resource] : main techniques / edited by Stefan Landis.
title_fullStr Lithography [electronic resource] : main techniques / edited by Stefan Landis.
title_full_unstemmed Lithography [electronic resource] : main techniques / edited by Stefan Landis.
title_auth Lithography main techniques /
title_new Lithography
title_sort lithography main techniques /
publisher ISTE ; Wiley,
publishDate 2011
physical xxv, 377 p. : ill. (some col.)
isbn 9781118621233 (electronic bk.)
callnumber-first T - Technology
callnumber-subject TK - Electrical and Nuclear Engineering
callnumber-label TK7872
callnumber-sort TK 47872 M3 L58 42011
genre Electronic books.
genre_facet Electronic books.
url https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1143629
illustrated Illustrated
dewey-hundreds 600 - Technology
dewey-tens 620 - Engineering
dewey-ones 621 - Applied physics
dewey-full 621.3815/31
dewey-sort 3621.3815 231
dewey-raw 621.3815/31
dewey-search 621.3815/31
oclc_num 830161630
work_keys_str_mv AT landisstefan lithographymaintechniques
AT proquestfirm lithographymaintechniques
status_str n
ids_txt_mv (MiAaPQ)5001143629
(Au-PeEL)EBL1143629
(CaPaEBR)ebr10671590
(CaONFJC)MIL462802
(OCoLC)830161630
is_hierarchy_title Lithography main techniques /
author2_original_writing_str_mv noLinkedField
noLinkedField
_version_ 1792330747933097984

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