Lithography : main techniques / / edited by Stefan Landis.
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologie...
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| Year of Publication: | 2011 |
| Language: | English |
| Online Access: | |
| Physical Description: | xxv, 377 p. :; ill. (some col.) |
| Notes: | Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. |
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| Summary: | "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781848212022 (hardback) 184821202X (hardback) 9781118621233 (electronic bk.) |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | edited by Stefan Landis. |