Lithography : main techniques / / edited by Stefan Landis.
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologie...
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| Year of Publication: | 2011 |
| Language: | English |
| Online Access: | |
| Physical Description: | xxv, 377 p. :; ill. (some col.) |
| Notes: | Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. |
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| 082 | 0 | 4 | |a 621.3815/31 |2 22 |
| 245 | 0 | 0 | |a Lithography |h [electronic resource] : |b main techniques / |c edited by Stefan Landis. |
| 260 | |a London : |b ISTE ; |a Hoboken, N.J. : |b Wiley, |c 2011. | ||
| 300 | |a xxv, 377 p. : |b ill. (some col.) | ||
| 500 | |a Adapted and updated from Lithography published 2010 in France by Hermes Science/Lavoisier. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 520 | |a "Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components"-- |c Provided by publisher. | ||
| 533 | |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. | ||
| 650 | 0 | |a Microlithography. | |
| 655 | 4 | |a Electronic books. | |
| 700 | 1 | |a Landis, Stefan. | |
| 710 | 2 | |a ProQuest (Firm) | |
| 856 | 4 | 0 | |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=1143629 |z Click to View |