Lithography : principles, processes and materials / / Theodore C. Hennessy, editor.
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| Superior document: | Engineering tools, techniques and tables |
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| TeilnehmendeR: | |
| Year of Publication: | 2011 |
| Language: | English |
| Series: | Engineering tools, techniques and tables.
Nanotechnology science and technology series. |
| Online Access: | |
| Physical Description: | xii, 284 p. :; ill. (some col.). |
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| Bibliography: | Includes bibliographical references and index. |
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| ISBN: | 1617618373 (hardcover) 9781611221237 9781617618376 (hardcover) |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Theodore C. Hennessy, editor. |