HiPIMS-Based Novel Deposition Processes for Thin Films.
Saved in:
Superior document: | Linköping Studies in Science and Technology. Thesis Series ; v.1537 |
---|---|
: | |
Place / Publishing House: | Linköping : : Linkopings Universitet,, 2012. {copy}2012. |
Year of Publication: | 2012 |
Edition: | 1st ed. |
Language: | English |
Series: | Linköping Studies in Science and Technology. Thesis Series
|
Online Access: | |
Physical Description: | 1 online resource (61 pages) |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Similar Items
-
The HiPIMS Process.
by: Lundin, Daniel.
Published: (2010.) -
Silicon Oxynitride Thin Films Grown by Reactive HiPIMS.
by: Hänninen, Tuomas.
Published: (2015.) -
Carbon Nitride and Carbon Fluoride Thin Films Prepared by HiPIMS.
by: Schmidt, Susann.
Published: (2013.) -
Synthesis of Carbon-Based and Metal-Oxide Thin Films Using High Power Impulse Magnetron Sputtering.
by: Aijaz, Asim.
Published: (2014.) -
Fundamental Aspects of HiPIMS under Industrial Conditions.
by: Samuelsson, Mattias.
Published: (2012.)