Nucleation and Stress Generation in Thin Films Deposited with a Pulsed Energetic Deposition Flux.
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| Superior document: | Linköping Studies in Science and Technology. Thesis Series ; v.1570 |
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| Place / Publishing House: | Linköping : : Linkopings Universitet,, 2012. {copy}2013. |
| Year of Publication: | 2012 |
| Edition: | 1st ed. |
| Language: | English |
| Series: | Linköping Studies in Science and Technology. Thesis Series
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| Online Access: | |
| Physical Description: | 1 online resource (61 pages) |
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| ISBN: | 9789175197067 |
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| Hierarchical level: | Monograph |