Materials science of thin films : deposition and structure / / Milton Ohring.
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| Year of Publication: | 2002 |
| Edition: | 2nd ed. |
| Language: | English |
| Online Access: | |
| Physical Description: | xxi, 794 p. :; ill. |
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| Bibliography: | Includes bibliographical references and index. |
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| ISBN: | 0125249756 (alk. paper) |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Milton Ohring. |