Materials science of thin films : deposition and structure / / Milton Ohring.

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Year of Publication:2002
Edition:2nd ed.
Language:English
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Physical Description:xxi, 794 p. :; ill.
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100 1 |a Ohring, Milton,  |d 1936- 
245 1 0 |a Materials science of thin films  |h [electronic resource] :  |b deposition and structure /  |c Milton Ohring. 
250 |a 2nd ed. 
260 |a San Diego, CA :  |b Academic Press,  |c 2002. 
300 |a xxi, 794 p. :  |b ill. 
504 |a Includes bibliographical references and index. 
533 |a Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries. 
650 0 |a Thin films. 
655 4 |a Electronic books. 
710 2 |a ProQuest (Firm) 
856 4 0 |u https://ebookcentral.proquest.com/lib/oeawat/detail.action?docID=294629  |z Click to View