Optical MEMS
Optical microelectromechanical systems (MEMS), microoptoelectromechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micro- or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays,...
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Year of Publication: | 2019 |
Language: | English |
Physical Description: | 1 electronic resource (172 p.) |
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