MEMS Accelerometers
Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Acceleromete...
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| Year of Publication: | 2019 |
| Language: | English |
| Physical Description: | 1 electronic resource (252 p.) |
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Electronic
| DOAB Directory of Open Access Books | Available |