Advances in Unconventional Lithography / / edited by Gorgi Kostovski.
The term Lithography encompasses a range of contemporary technologies for micro and nano scale fabrication. Originally driven by the evolution of the semiconductor industry, lithography has grown from its optical origins to demonstrate increasingly fine resolution and to permeate fields as diverse a...
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| Place / Publishing House: | Rijeka, Croatia : : IntechOpen,, 2011. |
| Year of Publication: | 2011 |
| Language: | English |
| Physical Description: | 1 online resource (200 pages) :; illustrations some color |
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Electronic
| DOAB Directory of Open Access Books | Available |