Lithography / / edited by Michael Wang.
Lithography, the fundamental fabrication process of semiconductor devices, plays a critical role in micro- and nano-fabrications and the revolution in high density integrated circuits. This book is the result of inspirations and contributions from many researchers worldwide. Although the inclusion o...
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| Place / Publishing House: | Rijeka, Croatia : : Intech,, [2010] ©2010 |
| Year of Publication: | 2010 |
| Language: | English |
| Physical Description: | 1 online resource (678 pages) :; illustrations |
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Electronic
| DOAB Directory of Open Access Books | Available |